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            Heidenhain敞開式直線光柵尺

            Heidenhain敞開式直線光柵尺與讀數(shù)頭和光柵尺或鋼帶間沒有機械接觸。這些光柵尺的典型應用包括:測量機、比較儀和其它長度計量精密設備以及生產(chǎn)和測量設備,例如用在半導體工業(yè)中。
            產(chǎn)品簡述


            Heidenhain敞開式直線光柵尺//海德漢敞開式直線光柵尺


            敞開式光柵尺與讀數(shù)頭和光柵尺或鋼帶間沒有機械接觸。這些光柵尺的典型應用包括:測量機、比較儀和其它長度計量精密設備以及生產(chǎn)和測量設備,例如用在半導體工業(yè)中。

            敞開式直線光柵尺設計用于需要高精度測量的機床和系統(tǒng)
            典型應用包括:

            • 半導體工業(yè)的測量和生產(chǎn)設備
            • PCB電路板組裝機
            • 超精密機床
            • 高精度機床
            • 測量機和比較儀,測量顯微鏡和其它精密測量設備
            • 直接驅(qū)動
            • 海德漢系統(tǒng)
              海德漢光柵
              海德漢編碼器

              Heidenhain
              Heidenhain數(shù)控系統(tǒng)

              敞開式直線光柵尺 



            Absolute encoders and encoders with position value output

            LIC

            The LIC exposed linear encoders permit absolute position measurement both over large paths of traverse up to 27 m and at high traversing speed. In their dimensions and mounting, they match the LIDA 400.

            ± 0.08 μm

            Up to 27040 mm

             LIP 200

            The LIP 211 and LIP 291 incremental linear encoders output the position information as a position value. The sinusoidal scanning signals are highly interpolated in the scanning head and converted to a position value by the integrated counter function. As with all incremental encoders, the absolute reference is determined with the aid of reference marks.

            ± 0.001 μm

            Da 20 mm a 3040 mm

            Incremental encoders

            LIP

            The LIP exposed linear encoders are characterized by very small measuring steps together with very high accuracy and repeatability. They operate according to the interferential scanning principle and feature a DIADUR phase grating as the measuring standard.

            Up to ± 0.04 μm

            Up to 3040 mm

            LIF

            The LIF exposed linear encoders have a measuring standard manufactured in the SUPRADUR process on a glass substrate and operate on the interferential scanning principle. They feature high accuracy and repeatability, are especially easy to mount, and have limit switches and homing tracks. The special version LIF 481 V can be used in high vacuum up to 10–7 bar (see separate Product Information sheet).

            ± 0.04 μm

            Up to 1020 mm

            LIDA

            The LIDA exposed linear encoders are specially designed for high traversing speeds up to 10 m/s, and are particularly easy to mount with various mounting possibilities. Steel scale tapes, glass or glass ceramic are used as carriers for METALLUR graduations, depending on the respective encoder. They also feature a limit switch.

            Up to ± 0.2 μm

            Up to 30040 mm

            PP

            On the PP two-coordinate encoder, a planar phase-grating structure manufactured with the DIADUR process serves as the measuring standard, which is scanned interferentially. This makes it possible to measure positions in a plane.

            ± 0.04 μm

            Measuring range 68x68mm

            LIC 4100

            Type

            Substrate and mounting

            Coefficient of
            expansion 

            Position error per signal period

            Meas.
            length

            LIC 4113
            undefinedLIC 4193

            Glass or glass ceramic scale, bonded to the mounting surface

            ≈ (0±0,1) x 10-6K-1

            ≈ 8 x 10-6K-1

            ± 0,04 μm

            240 mm to 3040 mm

            LIC 4115
            LIC 4195

            Steel scale tape drawn into aluminum extrusions and tensioned

            Same as mounting surface

            ± 0,04 μm

            140 mm to 28440 mm

            LIC 4117
            LIC 4197

            Steel scale tape drawn into aluminum extrusions and fixed

            ≈ 10 x 10-6K-1

            ± 0,04 μm

            240mm to 6040 mm

            LIC 4119
            LIC 4199

            Steel scale tape, cemented on mounting surface

            ≈ 10 x 10-6K-1

            ± 0,04 μm

            70 mm to 1020 mm

            LIC 2100

            Type

            Substrate and mounting

            Coefficient of expansion

            Position error per signal period

            Meas. length

            LIC 2117
            LIC 2197

            Steel scale tape drawn into aluminum extrusions and fixed

            ? ≈ 10 x 10-6K-1

            ± 1,5 μm

            120 mm to 3020 mm

            LIC 2119
            LIC 2199

            Steel scale tape, cemented on mounting surface

             ≈ 10 x 10-6K-1

            ± 1,5 μm

            120 mm to 3040 mm

            LIDA series for high traversing speeds and large measuring lengths

            Model

            Substrate and mounting

            Expansion
            coefficient

            Position error
            per signal period

            Measuring length

            Interface

            LIDA 473
            LIDA 483

            Glass or glass ceramic scale, bonded to the mounting surface

            ≈ 0 x 10-6K-1
            or
            ≈ 8 x 10-6K-1

            ± 0.2 μm

            240 mm to 3040 mm

            TTL
            1 VPP

            LIDA 475
            LIDA 485

            Steel scale tape drawn into aluminum extrusions and tensioned

            Same as mounting surface

            ± 0.2 μm

            140 mm to 30040 mm

            TTL
            1 VPP

            LIDA 477
            LIDA 487

            Steel scale tape drawn into aluminum extrusions and fixed

            ≈ 10 x 10-6K-1

            ± 0.2 μm

            240 mm to 6040 mm

            TTL
            1 VPP

            LIDA 479
            LIDA 489

            Steel scale tape, cemented on mounting surface

            ≈ 10 x 10-6K-1

            ± 0.2 μm

            Up to 6000 mm

            TTL
            1 VPP

            LIDA 277
            LIDA 287

            Steel scale tape drawn into aluminum extrusions and fixed

            ≈ 10 x 10-6K-1

            ± 2 μm

            Up to 10000 mm

            TTL
            1 VPP

            LIDA 279
            LIDA 289

            Steel scale tape, cemented on mounting surface

            ≈ 10 x 10-6K-1

            ± 2 μm

            Up to 10000 mm

            TTL
            1 VPP

            LIF series for high accuracy

            Model

            Substrate and mounting

            Expansion 
            coefficient 

            Position error
            per signal period

            Measuring length

            Interface

            LIF 471
            LIF 481

            Scale of Zerodur glass ceramic 
            or glass, bonded with
            PRECIMET adhesive film

            ≈ 8 x 10-6K-1

            ± 0.04 μm

            70 mm to 1020 mm

            TTL
            1 VPP

            LIP series for very high accuracy

            Model

            Substrate and mounting

            Expansion
            coefficient

            Position error
            per signal period

            Measuring length

            Interface

            LIP 372
            LIP 382

            Zerodur glass ceramic embedded 
            in bolted-on Invar carrier

            ≈ 0 x 10-6K-1

            ± 0.001 μm

            70 mm to 270 mm

            TTL
            1 VPP

            LIP 211
            LIP 281
            LIP 291

            Scale of Zerodur glass ceramic 
            with fixing clamps

            ≈ 0 x 10-6K-1

            ± 0.001 μm

            20 mm to 3040 mm

            1 VPP
            EnDat 2.2

            LIP 471
            LIP 481

            Scale of Zerodur glass ceramic 
            or glass with fixing clamps

            ≈ 0 x 10-6K-1
            or

            ≈ 8 x 10-6K-1

            ± 0.02 μm

            70 mm up to 3040 mm

            TTL
            1 VPP

            LIP 571
            LIP 581

            Glass scale, fixed with clamps

            ≈ 8 x 10-6K-1

            ± 0.04 μm

            70 mm to 1020 mm

            TTL
            1 VPP

            海德漢
            海德漢數(shù)控系統(tǒng)
            Heidenhain光柵

             
            
            
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